Thermal and E-beam Evaporator
용도
Deposition of metal electrode such as Au, Al, Ag, Pt etc
기본사양
Turbomolecular pumping systems
Base pressures <1 × 10-6 Torr
Metals, dielectrics and organics deposition
Up to 6” diameter substrates
Base pressures <1 × 10-6 Torr
Metals, dielectrics and organics deposition
Up to 6” diameter substrates
응용분야
LEDs (organic and quantum dot),
Solar Cells (organic/perovskite solar cells),
Supercapacitors,
etc
Solar Cells (organic/perovskite solar cells),
Supercapacitors,
etc