DC Sputtering System
용도
Amorphous ITO deposition on glass and flexible substrate at RT.
Flexible ITO electrode on PET, PES, PEN and PI substrate
Flexible ITO electrode on PET, PES, PEN and PI substrate
기본사양
Substrate up to 100x100 mm
Deposition at room temperature
- 80 nm thick a-ITO : Rsheet ~ 97 Ω/□, T550nm ~ 83%
- 160 nm thick a-ITO : Rsheet ~ 45 Ω/□, T550nm ~ 90%
Deposition at room temperature
- 80 nm thick a-ITO : Rsheet ~ 97 Ω/□, T550nm ~ 83%
- 160 nm thick a-ITO : Rsheet ~ 45 Ω/□, T550nm ~ 90%
응용분야
Flexible display and solar cells as bottom and top electrode.