This course gives a general introduction to the methods used to vapor deposit and pattern thin films.
The course starts with a brief introduction vacuum environment. Most of semiconductor and display manufacturing process such as evaporation, chemical vapor deposition, sputtering and plasma etching take place in a high vacuum condition.
The various thin-film deposition and processing method or technique such as thermal evaporation, e-beam evaporation, sputtering and chemical vapor deposition are covered.
Finally, an overview of thin film process in OLEDs is provided.